EECS Department

Prof. Mehregany's research interest is application-driven research at the intersections of the following fields:

• Micro/nanoelectromechanical systems

• Silicon carbide semiconductor technology

• Integrated circuits

• Information retrieval and social networks

Mehran Mehregany received his B.S. in Electrical Engineering from the University of Missouri in 1984, and his M.S. and Ph.D. in Electrical Engineering from Massachusetts Institute of Technology in 1986 and 1990, respectively. From 1986 to 1990, he was a consultant to the Robotic Systems Research Department at AT&T Bell Laboratories, where he was a key contributor to ground-breaking research in microelectromechanical systems (MEMS). In 1990, he joined the Department of Electrical Engineering and Applied Physics at Case Western Reserve University as an Assistant Professor. He was awarded the Nord Assistant Professorship in 1991, was promoted to Associate Professor with tenure in July 1994 and was promoted to Full Professor in July 1997. He held the George S. Dively Professor of Engineering endowed chair from January 1998 until July 2000, when he was appointed to the Goodrich Professor of Engineering Innovation endowed chair. He served as the Director of the MEMS Research Center at Case from July 1995 until December 2002. From January 2003 through December 2005, he was Chairman of the Electrical Engineering and Computer Science Department at Case. Professor Mehregany is well known for his research in the area of MEMS; he has ~300 publications describing his work, holds 16 U.S. patents and is the recipient of a number of awards/honors. He served as the Editor-in-Chief of the Journal of Micromechanics and Microengineering from (January 1996 to December 1997), Assistant-to-the-President of the Transducers Research Foundation (1994 to 2004) and is currently a Trustee of the Transducers Research Foundation and an Editor for the Journal of Microelectromechanical Systems.

In 1993, Professor Mehregany founded Advanced MicroMachines Incorporated (Cleveland, OH) to develop and commercialize silicon microsystems for high-value-added, high-performance (e.g., aerospace) applications; the company was acquired by the Goodrich Corporation in March 1999. In 2000, Professor Mehregany co-founded FLX Micro, Inc. (Cleveland, OH) which develops silicon carbide sensors for high-temperature applications. Also in 2000, Professor Mehregany founded NineSigma, Inc. (Cleveland, OH) which provides companies with tools and services for identifying and acquiring science and technology solutions from a global network of innovators.

• V. Hatty, H. Kahn, J. Trevino, M. Mehregany, C.A. Zorman, R. Ballarini, and A.H. Heuer, “Fracture Toughness of LPCVD Polycrystalline Silicon Carbide Thin Films,” Applied Physics Letters, vol. 99, pp. 013517-013517-3, 2006.

• S. Noh, E. Lee, J. Seo, and M. Mehregany, “Electrical Properties of Nickel Oxide Films for Flow Sensor Applications,” Sensors and Actuators, vol. A125, pp. 363-366, 2006.

• S. Roy, R. DeAnna, C. Deeb, C. Zorman, and M. Mehregany, “The Mechanical Properties of Polycrystalline 3C-SiC Films Grown on Polysilicon Substrates by Atmospheric Pressure Chemical Vapor Deposition,” Journal of Applied Physics, vol. 99, pp. 044108-044108-13, 2006.

• S.C. Jun, X.M.H. Huang, M. Manolidis, C.A. Zorman, M. Mehregany and J.C. Hone, “Electrothermal Tuning of Al-SiC Nanomechanical Resonators,” Nanotechnology, vol. 17, pp. 1506-1511, 2006.

• C.H. Wu, C.A. Zorman, and M. Mehregany, “Fabrication and Testing of Bulk Micromachined Silicon Carbide Piezoresistive Pressure Sensors for High Temperature Applications,” IEEE Sensors Journal, vol. 6, pp. 316-324, 2006.

• L. Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, M. Mehregany, and C.A. Zorman “SiC Cantilever Resonators with Electrothermal Actuation,” Sensors and Actuators A, vol. 128, pp. 376-386, 2006.

• S. Noh, X. Fu, L. Chen and M. Mehregany, “Deposition and Properties of Polycrystalline beta-SiC Using LPCVD with Different Dopant Amount,” Electronics Letters, vol. 42, pp. 775-777, 2006.

• S. Anderson, L. Jiang, R. Cheung, C.A. Zorman, and M. Mehregany, “Fabrication of Hall Device Structures in 3C-SiC Using Micro-Electro-Mechanical Processing Technology,” Microelectronic Engineering, vol. 83, pp. 1396-1399, 2006.